PISeca™單極位移感測器運(yùn)用亞納米級分辨力可以測定距離，位置和長度值。來自Physik Instrumente （PI）公司的電容感測器不接觸導(dǎo)電標(biāo)物對其進(jìn)行測量。PISeca™ D-510感測器探針可測量范圍20 µm, 50 µm和100 µm，電子可擴(kuò)展至500 µm。 電容位移感測器與PISeca™ E-852信號調(diào)節(jié)器電子相結(jié)合，分辨力為0.2納米（測量范圍小于 0.001%）。集成的線性化測量達(dá)到40納米，最大帶寬達(dá)到6.6 kHz，這些感測器系統(tǒng)還非常適用于機(jī)械部件的動態(tài)震動測量。 PI已經(jīng)在其高精度納米位移聯(lián)盟中多年使用電容位移感測器，PISeca™單極感測器經(jīng)久耐用，高溫下具有非常好的穩(wěn)定性，標(biāo)準(zhǔn)的感測器探頭和帶一個LED-bar間隔指示器的信號調(diào)理器電子確保了PISeca™感測器的簡單集成。 original text： [COLOR=#708090]Extremely Precise Distance Measurement—PISeca tm Capacitive Position Sensors PISeca™ single-electrode position sensors can determine distance, position and length values with sub-Nanometer resolution. Capacitive sensors from Physik Instrumente （PI） perform non-contact measurements against any kind of electrically conductive target. PISeca™ D-510 sensor probes are available for measurement ranges of 20 µm, 50 µm and 100 µm, electronically extendable up to 500 µm. In combination with PISeca™ E-852 signal conditioner electronics, they offer unmatched resolution to 0.2 nanometers （< 0.001% of the measurement range）. Due to integrated linearization, excellent linearity to 40 nanometers is reached. With a high maximum bandwidth of up to 6.6 kHz, these sensor systems are also well-suited for dynamic vibration-measurement of machine parts. Capacitive position sensors have been used for many years by PI for its own highest-precision nanopositioning stages. PISeca™ single-electrode sensors are fundamentally very robust and have very high temperature stability. Ease of integration of PISeca™ sensors is ensured by standardized sensor probes and signal conditioner electronics with an LED-bar gap indicator.[/COLOR]